Sputtering Cathodes

用于光学镀膜、ITO、半导体、太阳能产线的磁控溅射阴极、电弧镀、离子源及真空阀件

Planar magnetron sputter cathode — multiple sizes, cooling types and field strengths

Cylindrical magnetron sputter cathode with high target utilisation

Rotary magnetron cathode for large-area uniform deposition

Standard circular sputter cathode

High-efficiency, high-utilisation sputter cathode for ferromagnetic targets

High-current arc evaporation source for hard-coating deposition

Vacuum ion source for ion-assist, cleaning and etching

Magnetic-coupling seal replacing O-rings — widely used on ITO coating lines

Vacuum angle valve replacing bellows seals — longer life, better sealing